AFM Nanolithography
NanoFrazor – Thermal Probe Nanolithography
Heated tips offer the possibility to create arbitrary high-resolution nanostructures by local decomposition and evaporation of resist materials [1,2]. Closed-loop lithography and turnaround times of minutes are achieved with this patterning method due to the high-speed direct-write process and an in-situ imaging capability [3]. A marker-free stitching method [4], compatibility with CMOS processes [1,2,5] and high precision 3D patterning [1,2,5,6] complement this novel nanolithography concept. The technology has been developed at IBM and is now commercialized by SwissLitho, a spinoff company of the LSST.
References
[1] Pires et al., Science, 328, 732, (2010).
[2] Knoll et al., Advanced Materials, 22, 3361, (2010).
[3] Paul et al., Nanotechnology, 22, 275306, (2011).
[4] Paul et al., Nanotechnology, 23, 385307, (2012).
[5] Holzner et al., Applied Physics Letters, 99, 023110, (2011).
[6] Holzner et al., Nano Letters, 11(9), 3957, (2011).
Funding
SNF project 126905: Surface structuring by means of stimulated desorption of organic material
Partners
SwissLitho AG external page http://www.swisslitho.com
IBM Research Zurich external page http://www.zurich.ibm.com
Contact
Felix Holzner